JPH0512297Y2 - - Google Patents
Info
- Publication number
- JPH0512297Y2 JPH0512297Y2 JP803989U JP803989U JPH0512297Y2 JP H0512297 Y2 JPH0512297 Y2 JP H0512297Y2 JP 803989 U JP803989 U JP 803989U JP 803989 U JP803989 U JP 803989U JP H0512297 Y2 JPH0512297 Y2 JP H0512297Y2
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- flange
- vacuum port
- source
- beam source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 9
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 5
- 210000001015 abdomen Anatomy 0.000 claims description 4
- 239000000463 material Substances 0.000 description 16
- 230000006866 deterioration Effects 0.000 description 6
- 210000002445 nipple Anatomy 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000010292 electrical insulation Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP803989U JPH0512297Y2 (en]) | 1989-01-26 | 1989-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP803989U JPH0512297Y2 (en]) | 1989-01-26 | 1989-01-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0299972U JPH0299972U (en]) | 1990-08-09 |
| JPH0512297Y2 true JPH0512297Y2 (en]) | 1993-03-29 |
Family
ID=31213565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP803989U Expired - Lifetime JPH0512297Y2 (en]) | 1989-01-26 | 1989-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512297Y2 (en]) |
-
1989
- 1989-01-26 JP JP803989U patent/JPH0512297Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0299972U (en]) | 1990-08-09 |
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